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Increased performance all-fluoropolymer cartridge for aggressive applications

The Fluoroflow®-HSA filter cartridge provides good flow rates and on-stream life. The enhanced pleating provides more than 40% more surface area than our standard Fluoroflow®. This results in increased bath turnover and longer filter lifetime demanded by today's fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180ºC. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.
Unit of Measure

Specifications

Filter Rating

 N/A 0.03 µm

End Fittings

 N/A 226/Flat

Nominal Length

 N/A 10 in250 mm

O-Rings Material

 N/A Chemraz® FEP-Encapsulated Silicone FEP-Encapsulated Viton Kalrez None Silicone Viton®
Temperature Options1 N/A Electronic Standard (150ºC Max) High Temperature (180ºCMax)

Treatment Options

 N/A Ozone UPW Flush and Dried Ultraclean (Pre-Wet) UPW Flush and Dried Wet Packed

Materials of Construction

 N/A 100% Fluoropolymer construction
All components are thermally bonded to ensure integrity and reduce extractables.

Effective Filtration Area per 4 inch (100 mm) Cartridge

 N/A 4.8 ft²0.45 m²

Effective Filtration Area per 10 inch (250 mm) Cartridge

 N/A 9.8 ft²0.91 m²
Metals Extractables2 N/A Standard: < 20ppb (total) Ultraclean: < 5ppb (total)

Maximum Forward Differential Pressure/Temperature @ 75ºF (24ºC)

 N/A 80 psid5.5 bar

Maximum Forward Differential Pressure/Temperature @ 167ºF (75ºC)

 N/A 55 psid3.8 bar

Maximum Forward Differential Pressure/Temperature @ 257ºF (125ºC)

 N/A 30 psid2.0 bar

Maximum Forward Differential Pressure/Temperature @ 300ºF (150ºC)

 N/A 15 psid1.0 bar

Maximum Forward Differential Pressure/Temperature @ 75ºF (24ºC) (HT Option)

 N/A 100 psid6.8 bar

Maximum Forward Differential Pressure/Temperature @ 167ºF (75ºC) (HT Option)

 N/A 75 psid5.1 bar

Maximum Forward Differential Pressure/Temperature @ 257ºF (125ºC) (HT Option)

 N/A 50 psid3.4 bar

Maximum Forward Differential Pressure/Temperature @ 356ºF (180ºC) (HT Option)

 N/A 15 psid1.0 bar

Maximum Reverse Differential Pressure/Temperature @ 75ºF (24ºC)

 N/A 50 psid3.4 bar

Maximum Reverse Differential Pressure/Temperature @ 250ºF (121ºC)

 N/A 15 psid1.0 bar

Cleanliness (Particle Shedding)

 N/A Wet-packed: < 2 particles/ml > 0.2µm after 7gal at 1gpm
Typical Water Flow Rates3 N/A 0.65 gpm/psid3.6 lpm/100 mbar

TOC/Resistivity Rinse-Up (Wet-Packed)

N/A TOC recovery within 3-5ppb of feed without additional rinse-up. Resistivity recovery within 0.4 megohm-cm of feed after 22gal @ 1gpm.

Benefits

N/A

  • Increased filtration area for longer life
  • Higher flow rates for increased bath turn over
  • Wet-pack option for quick installation
  • Ultraclean wet-pack option for absolute cleanliness
  • All-fluoropolymer for most maximum chemical resistance
  • 100% integrity tested for consistent quality

    • Applications

    N/A

    • Wet etch and clean.
      - Phosphoric acid
      - Sulfuric acid
      - Hydrofluoric acid
      - Nitric acid
      - Piranha
      - SC1, SC2
      - NMP-based solvents
    • Other high temperature or ozonated processes

    Technical Support and Product Information

    N/A Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at www.parker.com or through your nearest Parker Hannifin Corporation office.

    Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries.

    Note

    N/A Specifications are subject to change without notification
    Fluoroflow is a registered trademark of Parker Hannifin Corporation.
    Viton and Kalrez are registered trademarks of E.I. DuPont de Nemours & Co., Inc.
    Chemraz is a registered trademark of Green, Tweed Inc.

    • 1 High Temperature is available only in 4", 10" and 20" lengths
    • 2 in a 10% HNO3 extraction
    • 3 Per 10" (250mm) cartridge equivalent