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Polypropylene membrane cartridges for microelectronics

Polyflow® Membrane cartridges are optimized for use in microelectronics applications such as bulk chemicals and photoresists. The all-polypropylene construction is an economical alternative to fluoropolymer-based cartridges.

Every cartridge is fabricated in a clean room environment, pre-flushed with 18 megohm-cm ultrapure DI water, and 100% integrity tested in an ISO-certified facility.
Unit of Measure

Specifications

Filter Rating

 N/A 0.04 µm

Insert Style

 N/A No Insert (Standard)

End Fittings

 N/A DOE

Nominal Length

 N/A 20 in500 mm

Gasket/O-Ring Material

 N/A Buna N EPDM FEP-Encapsulated Viton (O-Rings only) None Silicone Viton®

Thickness (Gaskets only)

 N/A 0.125" (3 mm) 0.200" (5 mm) (1) 0.200" (5 mm) & (1) 0.125" (3 mm) None

Treatment Options

 N/A Standard Wet Packed
Effective Filtration Area per 10 inch (250 mm) Cartridge1 N/A 7.7 ft²0.72 m²
Metals Extractables2 N/A < 50ppb (total)

Maximum Forward Differential Pressure/Temperature @ 75ºF (24ºC)

 N/A 80 psid5.5 bar

Maximum Forward Differential Pressure/Temperature @ 180ºF (82ºC)

 N/A 40 psid2.8 bar

Maximum Reverse Differential Pressure/Temperature @ 75ºF (24ºC)

 N/A 60 psid4.1 bar

Cleanliness (Particle Shedding)

 N/A Wet-packed < 1 particles/ml > 0.2µm after 10gal at 1gpm
Data as from open bag and installed, no additional installation flushing.
Typical Water Flow Rates3 N/A 0.41 gpm/psid2.2 lpm/100 mbar

Materials of Construction

Membrane

 N/A Polypropylene

Support Layers

 N/A Polypropylene

Structure

 N/A Polypropylene

TOC/Resistivity Rinse-Up (Wet-Packed)

N/A TOC rinse-up to background plus 5ppb of feed after 40gal @ 1gpm.
Resistivity rinse-up to background minus 0.2megohm-cm of feed after 40gal @1gpm.

Benefits

N/A

  • High-retention membrane
  • Wide range of configurations and ratings
  • 100% integrity tested

    • Applications

    N/A

  • Bulk photoresist
  • Bulk electronics grade chemicals

    • Technical Support and Product Information

    N/A Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at www.parker.com or through your nearest Parker Hannifin Corporation office.

    Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries.

    Note

    N/A Specifications are subject to change without notification.
    Polyflow is a registered trademark of Parker Hannifin Corporation.
    Viton is a registered trademarks of E.I. DuPont de Nemours & Co., Inc.
    Cuno is a registered trademarks of Cuno, Inc.

    • 1 Double layers of membrane
    • 2 in a 10% HNO3 extraction
    • 3 Per 10-inch (250 mm) cartridge equivalent.