The Fluoroflow® filter cartridge is our standard product for aggressive wet etch and clean applications. It provides good flow rates and on-stream life at an economical cost. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 150ºC. It is available either ozone DI flushed and dried or wet-packed for quick installation.
Specifications
Filter Rating |
N/A 0.2 µm |
End Fittings |
N/A 226/Fin |
Nominal Length |
N/A 20 in500 mm |
O-Rings Material |
N/A FEP-Encapsulated Viton |
Treatment Options |
N/A Ozone UPW Flush and Dry Ultraclean (Pre-Wet) UPW Flush and Dry Wet Packed |
Materials of Construction |
N/A 100% Fluoropolymer construction |
Effective Filtration Area per 10 inch (250 mm) Cartridge |
N/A 6.8 ft²0.63 m² |
Metals Extractables1 | N/A Standard: < 20ppb (total) Ultraclean: < 5ppb (total) |
Maximum Forward Differential Pressure/Temperature @ 75ºF (24ºC) |
N/A 80 psid5.5 bar |
Maximum Forward Differential Pressure/Temperature @ 167ºF (75ºC) |
N/A 55 psid3.8 bar |
Maximum Forward Differential Pressure/Temperature @ 257ºF (125ºC) |
N/A 30 psid2.0 bar |
Maximum Forward Differential Pressure/Temperature @ 300ºF (150ºC) |
N/A 15 psid1.0 bar |
Maximum Reverse Differential Pressure/Temperature @ 75ºF (24ºC) |
N/A 50 psid3.4 bar |
Maximum Reverse Differential Pressure/Temperature @ 250ºF (121ºC) |
N/A 15 psid1.0 bar |
Cleanliness (Particle Shedding) |
N/A Wet-packed < 2 particles/ml > 0.2µm after 7gal at 1gal/min |
Typical Water Flow Rates2 | N/A 3.2 gpm/psid17.6 lpm/100 mbar |
TOC/Resistivity Rinse-Up (Wet-Packed)
N/A TOC recovery within 3-5ppb of feed without additional rinse-up. Resistivity recovery within 0.4 megohm-cm of feed after 22gal @ 1gpm. |
Benefits
N/A
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Applications
N/A
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Technical Support and Product Information
N/A
Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at www.parker.com or through your nearest Parker Hannifin Corporation office. |
- 1 in a 10% HNO3 extraction
- 2 Per 10" (250mm) cartridge equivalent